New Functionality in Version 4.3

Plasma Modeling

  • New solver for Inductively Coupled Plasmas (ICP), which splits complex degrees of freedom into their real parts. This is much more stable when solving. It is recommended that the coils are driven by a fixed power from now on. To use the new solver on old models you need to regenerate the default solver.
  • Mesh control edges allow cathode fall regions to be resolved with unstructured meshes; see the DC Glow Discharge (positive_column_2d) example model.
  • It is now possible to compute the ion angular distribution function with the Particle Tracing Module as a 2D histogram.
  • Variables have now been grouped for easier results processing.
  • There is now a Reduced Electric Fields study type for the Boltzmann Equations, Two-Term Approximation interface.

New Models

New models that use the new solver for Inductively Coupled Plasmas:

  • Plasma enhanced chemical vapor deposition
  • Electronegative inductively coupled plasma

Backward Compatibility vs. 4.2a

Unit support for the characteristic potential length has been corrected. When you open an old model, COMSOL will automatically convert the potential characteristic length to the correct value. However, in previous versions you may have typed 3.3 for the potential characteristic length of Argon (in angstroms); you must now type 3.3[angstrom] in order to obtain identical results.