V. S. Nagaraja, Ramanuja H. S., Deepak K, S. L. Pinjare
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India
In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...
S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. ...
Multiphysics and Simulation of MEMS based Bolometer for Detecting the Radiations in Nuclear Power Plants
K. Umapathi, S. Swetha, K. Ranjitha, K. Vinodh, K. Deebiga, R. Harisudarsan
United Institute of Technology, Coimbatore, TamilNadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
High performance micro sensors are important to detecting special nuclear materials radiations in different fields to save the globe. This paper is mainly focused on to develop a MEMS based bolometer for detecting the nuclear radiation to provide the high security in Nuclear power Plants. A thermally sensitive micro metal plate is designed and placed on a substrate through micro thermal link. ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
A. Piyadasa[1,3], P. Gao[1,2,3]
Department of Physics, University of Connecticut, Storrs, CT, USA
Department of Materials Science & Engineering, University of Connecticut, Storrs, CT, USA
Institute of Materials Sciences, University of Connecticut, Storrs, CT, USA
3D finite element analysis model has been constructed for testing the directional dependence in a novel form of nanowire array gas flow sensor. Single nanowire (p-type single crystal Silicon) model is developed using fluid structure interaction and piezoresistivity components in the MEMS Module for COMSOL Multiphysics® software. Change in resistivity tensor due to induced stress in the nanowire ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
L. Wright, G. Memoli, P. Jones, E. Stride
National Physical Laboratory, Teddington, UK
University College London, London, UK
University of Oxford, Oxford, UK
Understanding the interactions between microbubbles and surfaces is key to the successful deployment of microbubbles in a range of applications. Two important examples are their use as a drug delivery mechanism, and their potential use of acoustically-driven bubbles as microscale sensors. Drug delivery with bubbles involves sonication at high frequency close to a boundary, and sensing with ...
T. Cavalcanti, A. Lima, J. Neto
Universidade Federal de Campina Grande, Campina Grande, PB, Brasil
Introdução: A medição adequada de vazão de fluidos é de grande importância nos processos industriais, pois tem implicações diretas na qualidade, produtividade, segurança e eficiência dos processos. Assim, torna-se necessário compreendermos como os fluidos se comportam para baixas velocidades, podendo, dessa forma, projetar estruturas que possam trabalhar em uma faixa de operação mais larga ou ...
J. Vijitha, S. S. Priya, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...
A. K. Namdeo, N. Ramakrishna, H. B. Nemade[1,2], and R. P. Palathinkal
 Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, Assam, India
 Centre for Nanotechnology. Indian Institute of Technology Guwahati, Assam, India
In this paper a finite element method(FEM) study of a surface acoustic wave (SAW)device excited by electrostatic coupling method is performed by using COMSOL Multiphysics. We have modeled a Rayleigh wave type SAW device by choosing YZ Lithium niobate as the substrate. The effect of external radio frequency (RF) field to the SAW device is analyzed. The effect of distance between the contactless ...