A. K. Ramesh , P. Ramesh ,
College of Engineering Munnar, Munnar, Kerala, India
Microelectromechanical system (MEMS) based capacitive pressure sensor designs with improved sensitivity is always a matter of great concern and the recent developments in such a design is the MEMS capacitive pressure sensor with bossed diaphragm.The bossed diaphragm model improves sensitivity but it compromises the range of operation which lead to a new design with the segmented boss structure. ...
S. Park, S. Chung, and J. Yeow
University of Waterloo, Systems Design Engineering, Waterloo, Ontario, Canada
A micromirror or a torsional actuator in general has been proven to be one of the most popular actuators fabricated by Micro-Electro-Mechanical System (MEMS) technology in many industrial and biomedical applications such as RF switches, a laser scanning display, an optical switch matrix, and biomedical image systems. In this paper, two stacked micromirrors are presented and analyzed to show ...
O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
J. Schumacher, P. Fideu, G. Ziegmann, and A. Herrmann
TU Clausthal-Institute of Polymere Materials and Plastic Engineering, Clausthal-Zellerfeld, Germany
CTC GmbH Stade, Stade, Germany
Faserinstitut Bremen e.V., Bremen, Germany
The current paper focuses on the creation of a consistent environment for the numerical prediction of the physical properties of polymer composite. A limitation factor for the successful simulation of composite processes is the correct estimation of the effective properties depending on several factors such as the constituents (fiber, polymer), the process setup. The numerical prediction of the ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
K K BIRLA GOA CAMPUS
Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...
Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®
A. Ndieguene, I. Kerroum, F. Domingue, A. Reinhardt
Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France
Due to the increasing demand for hydrogen gas sensors for applications such as automation, transportation, or environmental monitoring, the need for sensitive and reliable sensors with a short response time is increasing. This paper presents an empirical model that studies the sensitivity of acoustic hydrogen gas sensors. A parametric study based on the variation of physical properties of ...
I.M. Abdel-Motaleb, J. Lavrencik 
Department of Electrical Engineering, Northern Illinois University, DeKalb, IL, USA
There is urgent need to monitor dental and oral diseases, such as tooth decay, gum diseases, and teeth grinding. Such monitoring can be achieved by embedding sensors in the mouth. This technique faces some difficulties. The first is how the power needed for the operation of the sensors and the associated electronic chips can be generated. This power can be generated using the pressure exerted by ...
S. Takahashi, S. Ogata
Tokyo Metropolitan University Hachioji City, Tokyo, Japan
We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...
M. J. Hancock, N. H. Elabbasi, M. C. Demirel
Veryst Engineering, LLC., Needham, MA, USA
Pennsylvania State University, University Park, PA, USA
Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed geometry are the same regardless of flow direction. Recently we developed a class of microfluidic pump designs based on tilted flexible structures that combines the concepts of cilia (flexible elastic elements) and rectifiers (e.g., Tesla pump). We ...