C. Grau Turuelo, B. Bergmann, C. Breitkopf
Technische Universität Dresden, Dresden, Germany
The void shape evolution of a trench patterned silicon substrate results in diverse cavities by varying initial conditions. The size and the arrangement of the initial trenches are decisive for the transformation process besides the annealing conditions which are, in fact, time and temperature, and the existing pressure values. The prediction of the shape evolution depending on different ...
Shambhu Singh, Dr. N N Sharma
Birla Institute of Technology and science, Pilani, Rajasthan, India
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A ...
Siram Sai Krishna, Nuti Venkata Subrahmanya Ayyappa Sai, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
The Micro electro mechanical systems (MEMS) technology provides us a platform to interface between mechanical and electrical components. In this paper, we have designed MEMS accelerometer based on piezoelectric property, and simulated using COMSOL Multiphysics®. The design, which has PZT kept in the annular diaphragm, provides good sensitivity. When this accelerometer is subjected to stress ...
J. Wala, D. Maji, S. Dhara, S. Das
Indian Institute of Technology Kharagpur, Kharagpur, West Bengal, India
Cells are complex entities which not only passively sense external stimuli (viz. chemical, optical or mechanical) but also interact with extracellular matrix (ECM) by regulating cellular behavior such as growth, proliferation, migration, etc. Monitoring cell growth and migration of adherent cells becomes a crucial factor in determining cell-cell and cell-substrate interaction, important for ...
E. Gutierrez-Miravete, and J. Streeter
Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
Optiwind, Torrington, Connecticut, USA
The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...
O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
University of Applied Sciences, Regensburg, Germany
This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Chungli,Taiwan
National Tsing Hua University, Hsinchu, Taiwan
Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation.
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the ...
Modeling and Simulation of the Rapid and Automated Measurement of Biofuel Blending in a Microfluidic Device under Pressure Driven Flow using COMSOL Multiphysics®
Sanket Goel, Venkateswaran PS, Rahul Prajesh, Ajay Agarwal
University of Petroleum & Energy Studies, Bidholi, Prem Nagar, Dehradun, India
CSIR - Central Electronics Engineering Research Institute,(CSIR-CEERI) Pilani, India
• Real-time detection and monitoring of bio-fuel blend-ratio and adulterated automobile fuels by a reproducible micro-fabrication process in a cost-and-time efficient manner. • COMSOL Multiphysics® simulations and modelling of Viscosity based Laminar Flow inside a Y-shaped Micro-fluidic Device. • Design and Fabrication of a polymer Y-shaped Micro-fluidic Device to work as ...