V. S. Nagaraja, Ramanuja H. S., Deepak K, S. L. Pinjare
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India
In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...
K. PraveenKumar, P. Suresh, K. Subash, M. Alagappan, A. Gupta
PSG College of Technology, Coimbatore, Tamil Nadu, India.
In this work, we present the performance analysis of novel micro machined Piezoresistive fluid flow pressure sensor using COMSOL Multiphysics. The principle of the sensing mechanism is based on the deflection of four sensing layers embedded on a thin membrane. The fluid passes through the layer causes the deflection of the sensing layer which measures the pressure of the fluid. The following ...
Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm
S.Manikandan, R.Radeep krishna
Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India
The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical System (MEMS). In resonator design the basic problem is that the frequency changes with temperature variation and quantitative explanation with respect to this varies. The change can be attributed to the stability in terms of frequency drift in parts ...
J. Liu , V. B. Chalivendra , C. Goldsmith , W. Huang ,
 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
 MEMtronics Corporation, Richardson, TX, USA
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...
S. Park, S. Chung, and J. Yeow
University of Waterloo, Systems Design Engineering, Waterloo, Ontario, Canada
A micromirror or a torsional actuator in general has been proven to be one of the most popular actuators fabricated by Micro-Electro-Mechanical System (MEMS) technology in many industrial and biomedical applications such as RF switches, a laser scanning display, an optical switch matrix, and biomedical image systems. In this paper, two stacked micromirrors are presented and analyzed to show ...
S. Baskaran, S. Thiruvannamalai, N. Ramachandran, F.M. Sebastian, and J.Y. Fu
State University of New York at Buffalo, Buffalo, New York, USA
This paper presents a novel methodology towards the design, analysis, and the fabrication process involved in developing a cost effective method to create a piezoelectric actuator by means of the flexoelectric effect. The basic physical equations of the flexoelectric effect and the qualitative analysis of the flexoelectric actuator are done using COMSOL Multiphysics. This effect is used to align ...
Study of Fluid and Mass Adsorption Model in the QCM-D Sensor for Characterization of Biomolecular Interaction
H.J. Kwon, C.K. Bradfield, B.T. Dodge, and G.S. Agoki
Department of Engineering and Computer Science, Andrews University, Berrien Springs, Michigan, USA
Increasing attention has been paid to application of the quartz crystal microbalance with dissipation (QCM-D) sensor for monitoring biomolecular interactions. This paper focuses on a practical application of protein-protein binding affinity measurement at low concentrations and minimal sample sizes (50-200 μl of 20-200 nM), which results in low signal measurement. A model simulating fluid ...
L. Moro, F. Lugli, and F. Zerbetto
Department of Chemistry “G. Ciamician”, Università di Bologna, Bologna, Italy
Rotaxanes are a class of molecules recently developed in laboratory that have been heralded as possible molecular motors. The motor is constituted by a linear molecule (thread) and a ring-shaped molecule (macrocycle), which is free to move along the thread, switching between two, or more, energetically stable interaction points (stations). Molecular motors start their functioning far from ...
B. Reine, J. Di-Tomaso, G. Dusserre, P. Olivier
Université de Toulouse, UPS, INSA, Mines Albi, ISAE, ICA, IUT, Dept. GMP, Toulouse Cedex, France
RESCOLL - Société de Recherche, Pessac Cedex, France
This paper addresses the study of thermal behavior of thermoset polymer matrix filled with microparticles. A numerical model was developed with COMSOL Multiphysics to get a random spatial distribution of fillers in a representative volume element (RVE). This model was then compared to an analytical reference model (Hamilton model) and experimental results. This comparison highlights a good ...
Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy
L. S. Sundharam
Kumaraguru college of Technology, Coimbatore, Tamil nadu, India
The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...