Design and Simulation of MEMS Anemometer

D. Tandon [1], N. Kothari [1],
[1] Birla Institute of Technology & Science, Pilani, Rajasthan, India
Published in 2015

Wind speed measurement is a very important factor in various fields such as aeronautics, meteorology and farming. The conventional wind sensor comprises of small mechanical apparatus such as propeller and cup anemometers, or consists of thermal element such as hot wire anemometers, or has acoustic part such as acoustic radar. This paper concentrates on the design and simulation of a MEMS wind speed sensor (Anemometer) which is sensitive to low wind speed. The sensor that is based on the thermal anemometer principle was designed using COMSOL Multiphysics software and subsequently simulating its working, performing a thorough study of the parameters involved and propose inroads into possible improvements in design and applications.