Surface Micromachined Accelerometer

Application ID: 17325


This model shows how to simulate a capacitively actuated surface micromachined accelerometer, using the Electromechanics Interface. It is based on a case study from the book Microsystem Design by Stephen D. Senturia (Kluwer Academic Publishers, 5th Edition, 2003, pages 513-525).

This model example illustrates applications of this type that would nominally be built using the following products:

MEMS Module