Pulsed CCP Discharge

Application ID: 67251


This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied.

This model example illustrates applications of this type that would nominally be built using the following products: