Pulsed CCP Discharge
Application ID: 67251
This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied.
This model example illustrates applications of this type that would nominally be built using the following products:Plasma Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.