Plasma Module

New App: GEC CCP

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. This app investigates the mechanism of power deposition into the plasma due to a sinusoidal electrostatic field operating at 13.56 MHz. The app demonstrates the use of a modal preferences form to allow the selection of output format for the generated report.

Screenshot of the GEC CCP application where a number of the inputs can be varied. Screenshot of the GEC CCP application where a number of the inputs can be varied.

Screenshot of the GEC CCP application where a number of the inputs can be varied.