V. S. Selvakumar, M. S. Gowtham, M. Saravanan, S. Suganthi, and L. Sujatha
Rajalakshmi Engineering College
Micro-tweezers have been widely investigated because of their extensive applications in micro-fluidics technology, microsurgery and tissue-engineering. It has been reported that thermal actuation provides greater forces and easier control when compared to electrostatic micro actuation. In this paper, we discuss about the effects of Alumina as gripper on the operation of micro tweezers. The ...
M. Ramya, R. P. S. Valli, R. Vidya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In this study, a biomimetic vibrating 3D MEMS Gyroscope is designed, consisting of two circular diaphragms with a club shaped structure placed over one of them. This MEMS based vibrating gyroscope was modeled and simulated using COMSOL Multiphysics 4.1 - MEMS module. The purpose of the research was to develop an effective gyroscope for guidance and control of mobile robots. The simulated ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
P. K. Podder, D. Mallick, D. P. Samajdar, and A. Bhattacharyya
Institute of Radio Physics and Electronics
University of Calcutta
West Bengal, India
In this paper, we have addressed the issues related to the design and simulation of MEMS based silicon micro-needles for insertion of fluid into the dermis layer and into the subcutaneous fat layer. In addition, a poly-silicon micro-pump based on the principle of electrostatic actuation has been designed and simulated which can be integrated with the proposed micro-needles to control the fluid ...
Heat Generation from Dielectric Loss, Internal Heat Generation and Vibration in COMSOL4.2 Multiphysics
T. R. Jeba, B. Vins, and V. Ramamoorthy
This paper presents a FEA approach to estimate temperature rise and thermal stress experienced in PZT/Solid structure due to internal heat generation and dynamic excitation. The power dissipative density consumed by structural damping of the mass structure, internal heat generation due to applied voltage and dielectric loss of the PZT material is first determined. The dissipative power is then ...